首(shou)先步需(xu)要(yao)測(ce)試(shi)體(ti)積電(dian)(dian)(dian)阻(zu)(zu)(zu)(zu)值(zhi)和(he)表面電(dian)(dian)(dian)阻(zu)(zu)(zu)(zu)值(zhi)，然后根據試(shi)樣(yang)的尺(chi)寸和(he)電(dian)(dian)(dian)極系數，根據計算公式得到體(ti)積電(dian)(dian)(dian)阻(zu)(zu)(zu)(zu)率和(he)表面電(dian)(dian)(dian)阻(zu)(zu)(zu)(zu)率，體(ti)積和(he)表面電(dian)(dian)(dian)阻(zu)(zu)(zu)(zu)測(ce)試(shi)時，對電(dian)(dian)(dian)壓試(shi)樣(yang)的位置不同(tong)，從(cong)而(er)能夠不同(tong)的電(dian)(dian)(dian)阻(zu)(zu)(zu)(zu)值(zhi)

在(zai)接(jie)和未接(jie)試(shi)樣(yang)時(shi)電(dian)(dian)(dian)(dian)容(rong)的(de)變化量是通過這(zhe)個(ge)電(dian)(dian)(dian)(dian)容(rong)器來(lai)(lai)測(ce)得。在(zai)測(ce)微計電(dian)(dian)(dian)(dian)極(ji)(ji)(ji)中(zhong)(zhong)，次要的(de)誤差(cha)來(lai)(lai)源于(yu)電(dian)(dian)(dian)(dian)容(rong)校(xiao)正時(shi)所包(bao)含的(de)電(dian)(dian)(dian)(dian)極(ji)(ji)(ji)的(de)邊緣電(dian)(dian)(dian)(dian)容(rong)，此(ci)邊緣電(dian)(dian)(dian)(dian)容(rong)是由于(yu)插(cha)入一個(ge)與電(dian)(dian)(dian)(dian)極(ji)(ji)(ji)直(zhi)徑相同的(de)試(shi)樣(yang)而稍微有所變化,實際(ji)上只要試(shi)樣(yang)直(zhi)徑比電(dian)(dian)(dian)(dian)極(ji)(ji)(ji)直(zhi)徑小2倍試(shi)樣(yang)厚度，就可消除這(zhe)種(zhong)誤差(cha)。首先將(jiang)(jiang)試(shi)樣(yang)放在(zai)測(ce)微計電(dian)(dian)(dian)(dian)極(ji)(ji)(ji)間并調(diao)節測(ce)量電(dian)(dian)(dian)(dian)路參數。然后取(qu)出試(shi)樣(yang)，調(diao)節測(ce)微計電(dian)(dian)(dian)(dian)極(ji)(ji)(ji)間距或重新(xin)調(diao)節標準電(dian)(dian)(dian)(dian)容(rong)器來(lai)(lai)使電(dian)(dian)(dian)(dian)路的(de)總(zong)電(dian)(dian)(dian)(dian)容(rong)回到初始值。△G——接(jie)入試(shi)樣(yang)后，（圖1）的(de)兩個(ge)電(dian)(dian)(dian)(dian)容(rong)讀數之差(cha)。值得注意(yi)的(de)是在(zai)整(zheng)個(ge)試(shi)驗過程中(zhong)(zhong)試(shi)驗頻(pin)率應保持不變。貼在(zai)試(shi)樣(yang)上的(de)電(dian)(dian)(dian)(dian)極(ji)(ji)(ji)的(de)電(dian)(dian)(dian)(dian)阻在(zai)髙(gao)頻(pin)下(xia)會變得相當大(da)，如果試(shi)樣(yang)不平整(zheng)或厚度不均勻，將(jiang)(jiang)會引起試(shi)樣(yang)損耗因數的(de)明顯增加。這(zhe)種(zhong)變得明顯起來(lai)(lai)的(de)頻(pin)率效應，取(qu)決于(yu)試(shi)樣(yang)表面的(de)平整(zheng)度。

該頻(pin)率(lv)也(ye)可(ke)(ke)低到10MHzt因(yin)此(ci)，必須(xu)在ioMHg及更(geng)高的(de)(de)頻(pin)率(lv)下，且沒有貼(tie)電(dian)(dian)(dian)(dian)(dian)(dian)極(ji)(ji)的(de)(de)試(shi)樣(yang)(yang)上做電(dian)(dian)(dian)(dian)(dian)(dian)容的(de)(de)損耗因(yin)數的(de)(de)附加測(ce)量，假設Cw和(he)(he)tan<5w為不貼(tie)電(dian)(dian)(dian)(dian)(dian)(dian)極(ji)(ji)的(de)(de)試(shi)樣(yang)(yang)的(de)(de)電(dian)(dian)(dian)(dian)(dian)(dian)容和(he)(he)損耗因(yin)數，Cw-…帶電(dian)(dian)(dian)(dian)(dian)(dian)極(ji)(ji)的(de)(de)試(shi)樣(yang)(yang)電(dian)(dian)(dian)(dian)(dian)(dian)容。在一個線(xian)路兩點之(zhi)間的(de)(de)接地(di)屏(ping)(ping)蔽(bi)(bi)，可(ke)(ke)消除這兩點之(zhi)間的(de)(de)所有的(de)(de)電(dian)(dian)(dian)(dian)(dian)(dian)容，而(er)被這兩個點的(de)(de)對(dui)地(di)電(dian)(dian)(dian)(dian)(dian)(dian)容所代(dai)替(ti)，因(yin)此(ci)，導線(xian)屏(ping)(ping)蔽(bi)(bi)和(he)(he)元件屏(ping)(ping)蔽(bi)(bi)可(ke)(ke)任意運用(yong)在那些各點對(dui)地(di)的(de)(de)電(dian)(dian)(dian)(dian)(dian)(dian)容并不重要(yao)(yao)的(de)(de)線(xian)路中；變(bian)壓器(qi)(qi)電(dian)(dian)(dian)(dian)(dian)(dian)橋和(he)(he)帶有瓦格納接地(di)裝置的(de)(de)西林電(dian)(dian)(dian)(dian)(dian)(dian)橋都是(shi)這種類(lei)型的(de)(de)電(dian)(dian)(dian)(dian)(dian)(dian)路。從另一方(fang)面來說,在采(cai)用(yong)替(ti)代(dai)法電(dian)(dian)(dian)(dian)(dian)(dian)橋里，在不管有沒有試(shi)樣(yang)(yang)均保持不變(bian)的(de)(de)線(xian)路部分是(shi)不需要(yao)(yao)屏(ping)(ping)蔽(bi)(bi)的(de)(de)。實際上，在電(dian)(dian)(dian)(dian)(dian)(dian)路試(shi)樣(yang)(yang)、檢測(ce)器(qi)(qi)和(he)(he)振(zhen)蕩器(qi)(qi)的(de)(de)連(lian)線(xian)屏(ping)(ping)蔽(bi)(bi)起來。對(dui)于100kHz數量級或(huo)更(geng)高的(de)(de)頻(pin)率(lv)，連(lian)線(xian)應(ying)可(ke)(ke)能短而(er)粗。